• Title: Microsystem Design – Optical and RF Applications
• Instructor: Dr. DooYoung Hah
  
• When/where/call number: MWF 1:40-2:30PM / EE 149 / 1907
  
• Office hour: MW 4:30-5:30PM, TTh 4:00-5:30PM
  
• Textbook: Lecture notes
  
• References
  • Senturia, Microsystem Design, Kluwer, 2000
  • Madou, Fundamentals of Microfabrication, CRC, 2002
  • Rebeiz, RF MEMS, Wiley, 2002
• Syllabus click here
  
• Exam Schedule
  
  • Midterm: Oct. 22, Mon., in-lecture
  • Final: Dec. 14, Fri., 3-5 pm

    Notices and Announcements

• 12/15  Grade has been posted.(Click here)
  
• 11/30  Solution for the Project
  • Mathcad version
    
  • Matlab version
    
• 11/16  Solution for HW#4 has been posted below.
• 11/05  Solution for HW#3 has been posted below.
• 09/10  The midterm exam date has been changed again to Oct. 22 (Mon).
• 08/29  The midterm exam date has been changed to Oct. 29 (Mon).
• 08/27  The password to open the lecture note files will be provided during the class by the instructor.
• 08/01  Welcome to the course website of EE7200-1, fall 2007.

    Lecture Notes

• 1. Introduction
  
• 2. Microfabrication
  
• 3. Mechanics of materials
  
• 4-1. Actuators (I) - electrostatic
  
• 4-2. Actuators (II) - electromagnetic
  
• 4-3. Actuators (III) - piezoelectric
  
• 4-4. Actuators (IV) - electrothermal
  
• 5. Optical microsystems (I) - micromirrors
  
• 6. Optical microsystems (II) - tunable devices
  
• 7. Optical microsystems (III) - applications
  
• 8. RF MEMS switches
  

    Solutions to the Home Assignments

• Home Assignment #3 (11/5)
  
• Home Assignment #4 (11/16)
  
• Home Assignment #5 (12/13)
  

    Reading Materials

• These are not reading assignments but for the background reading.
• Bulk micromachining: G. T. A. Kovacs, et al., "Bulk micromachining of silicon," Proc. IEEE, 86:8, 1536-51, 1998.
• Surface micromachining: J. M. Bustillo, et al., "Surface micromachining for microelectromechanical systems," Proc. IEEE, 86:8, 1552-74, 1998.
• RF MEMS review (1): J. J. Yao, "Topical review: RF MEMS from a device perspective," J. Micromech. Microeng., 10, R9-38, 2000.
• RF MEMS review (2): C. T. C. Nguyen, et al., "Micromachined devices for wireless communications," Proc. IEEE, 86:8, 1756-68, 1998.
• Microoptics: R. S. Muller, et al., "Surface-micromachined microoptical elements and systems," Proc. IEEE, 86:8, 1705-20, 1998.
• Digital micromirror devices (DMD): P. F. van Kassel, et al., "A MEMS-based projection display," Proc. IEEE, 86:8, 1687-1704, 1998.
• Pull-in phenomenon analysis of torsional electrostatic actuators: D. Hah, et al., DTIP 2002