Martin Feldman
Professor Emeritus
Areas of Interest
Applied optics, X-ray lithography, micromachining.
Room 3330C Patrick Taylor Hall
+1 (225) 578-5489, mfeldm1@lsu.edu
Home Page
Biographical Sketch
Martin Feldman received the BS degree in Physics from Rensselaer Polytechnic Institute in 1957, and the PhD degree in Experimental Physics from Cornell University in 1962. His doctoral research, with Raphael M. Littauer, was in the area of high energy particle physics.
From 1962 to 1968 Dr. Feldman performed fundamental research in high energy particle physics at Cornell University and the University of Pennsylvania, where he was an Assistant Professor. From 1968 to 1989 he provided systems engineering expertise for silicon IC manufacturing at AT&T Bell Labs. While there he invented zone plate alignment, developed an alignment system for a deep UV step and repeat camera, and developed Fourier transform lithographic and alignment systems for optical and X-ray exposure tools. He designed and constructed the Laser Reticle Generator, used to pattern artwork for IC masks, and designed and constructed the first Automatic Mask Inspection System (AMIS).
Since 1989 he has been a professor at Louisiana State University. His teaching and research have focused on electronics, optics, lithography, nanofabrication, and metrology. He implemented an X-ray exposure tool and developed an alignment system for it at the Center of Advanced Microstructures and Devices (CAMD). He demonstrated a "phase shift" optical microscope with twice the diffraction limit of resolution, a thermal loading system to compensate distortions in membrane masks, diffractive display systems, X-ray zone plates, metrology tools for integrated circuits with nanometer accuracy, and an ultrastiff stage for imprint lithography. At present he is developing a mm diameter endoscope based on optical coherence tomography and MEMS technology.
He is a frequent reviewer for the Journal of Vacuum Science and Technology and other journals, has published over 45 papers in refereed journals, and is the inventor of over 30 patents. He serves as faculty adviser to the LSU chapter of the National Society of Black Engineers (NSBE), and in 2010 was the Program Chair of the 54th International Conference on Electron, Ion and Photon Beam Technology & Nanofabrication, considered to be the premier conference on the science and technology of nanopatterning. In his spare time he writes funny poems.