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Martin Feldman
Professor |
Areas of major interest are applied optics, X-ray lithography and nanofabrication, and metrology.
Martin Feldman received the BS degree in Physics from Rensselaer Polytechnic Institute in 1957, and the PhD degree in Experimental Physics from Cornell University in 1962. His doctoral research, with Raphael M. Littauer, was in the area of high energy particle physics.
From 1962 to 1968 Dr. Feldman performed fundamental research in high energy particle physics at Cornell University and the University of Pennsylvania, where he was an Assistant Professor. From 1968 to 1989 he provided systems engineering expertise for silicon IC manufacturing at AT&T Bell Labs . While there he invented zone plate alignment, developed an alignment system for a deep UV step and repeat camera, and developed Fourier transform lithographic and alignment systems for optical and X-ray exposure tools. He designed and constructed the Laser Reticle Generator, used to pattern artwork for IC masks, and designed and constructed the first Automatic Mask Inspection System (AMIS).
Since 1989 he has been a professor at Louisiana State University. His teaching and research have focused on electronics, optics, X-ray lithography, nanofabrication, and metrology. He implemented an X-ray exposure tool and developed an alignment system for it at the Center of Advanced Microstructures and Devices (CAMD). He demonstrated a "phase shift" optical microscope with twice the conventional resolution, a thermal loading system to compensate distortions in membrane masks, diffractive display systems, and microscopic lenses that can be used to focus X-rays. At present he is developing diffractive structures with unusual optical focusing properties, and a low cost metrology tool that can measure the separation between integrated circuit features to a few nanometers.
He is a frequent reviewer for the Journal of Vacuum Science and Technology and other journals, has published over 45 papers in refereed journals, and is the inventor of over 30 patents. He serves as faculty adviser to the LSU chapter of the National Society of Black Engineers (NSBE). In his spare time he writes funny poems.