AET RAPID THERMAL PROCESSOR
Model No: RXV4

Heat source: Quartz halogen lamps
Chamber size: 4" quartz processing chamber and 4" quartz tray
Temperature-time limits:
         Max temp. 1000 C for 1 hr max.
         Max temp. 1100 C for 10 min max.
         Max temp. 1200 C for 3 min max.
         Max temp. 1300 C for 10 s max.