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On-Going Research Projects:
 

  • Integration of LIGA and LIGA-like structures with CMOS circuitry.
     
  • Low-temperature deposition of silicon nitrides and silicon oxynitrides.
     
  • Integration of PZT sensor technology with Si technology.
     
  • Direct integration of mechanical motion with electronics on a chip.
     
  • Microelectromechanical system (MEMS) fabrication.