EE 7240 - Fall 2006
Title: Integrated Circuit Engineering
- Catalog Description: EE7240 (3) Fabrication processes and device design for monolithic integrated circuits; relation to circuit performance; thin- and thick-film circuits.
- Instructor: Dr. Dooyoung Hah (homepage)
- Lecture: MWF 10:40-11:30, 149 EE Building
- Office hour: MW 1:00 - 2:00 PM, TTh 10:30 - 12:00 AM, other times by appointment only
- Textbook: J. Plummer, M. Deal, and P. Griffin, "Silicon VLSI Technology - Fundamentals, Practice and Modeling," Prentice Hall, 2000.
- Reference: S. Wolf and R. N. Tauber, "Silicon Processing for the VLSI Era, Volume 1 - Process Technology," Lattice Press, 1986.
- Exam schedule: Mid-term - Oct. 18, Wed., Final - Dec. 15, Fri. 5:30-7:30 PM.
Notice
- The average class score for the mid-term exam is 65.14 out of 89 (73%).
Solutions for the Home Assignments
- Home Assignment #1 (pdf)
- Home Assignment #2 (pdf)
- Home Assignment #3 (pdf)
- Home Assignment #4 (pdf)
Course Materials
- 1. Introduction (pdf)
- 2. Basics of semiconductors (pdf)
- 3. CMOS process (pdf)
- 4. Crsytal structures of semiconductors and wafer growth (pdf)
- 5. Oxidation (pdf)
- 6. Lithography (pdf)
- 7. Diffusion (pdf)
- 8. Ion implantation (pdf)
- 9. Thin film deposition I (pdf)
- 10. Thin film deposition II (pdf)
- 11. Etching (pdf) NEW!