EE 7200-2 - Fall 2005
Title: Microsystem Design - Optical and RF Applications
- Instructor: Dr. Dooyoung Hah
- Class: MWF 12:40-1:30, 149 EE
- Office hour: MW 3:30-6:00 PM
Announcement
- IMPORTANT! If you like to know your final score, please visit my office between 8:00am and 12:00am on 12/19 (M).
- The mid-term exams have been rescheduled. (Mid-term1: Oct. 17, Mid-term2: Nov. 18)
- Only personal use of these materials is permitted. Permission to reprint/republish these materials for advertising or promotional purposes or for creating new collective works for resale or redistribution to servers or lists, or to reuse any copyrighted component of this work in other works must be obtained from the corresponding publishers.
- The term project guideline has been handed out. (pdf)
- Please be informed by the below detailed term project presentation guideline.
Home Assignments
Term Project Presentation Schedule
- Presentation - 15 minutes, Q&A - 5 minutes
- Method: computer + beam projector
- Acceptable file formats: MS powerpoint, Adobe Acrobat (IMPORTANT: Please use standard fonts)
- File provision: e-mail (by noon on the presentation date), USB drive, CD-ROM (bring to class)
- Dec. 5, Monday
- Ok, Jeong Tae - Unique fabrication method for individual CNT AFM tip
- Dec. 7, Wednesday
- Kim, Namwon - Disposable Polymer-Based Microfluidic Chips Used in Spectrophotometer
- Park, Taewoo - Integrated MEMS
- Dec. 9, Friday
- Park, Taehyun - Application of micro-fludic biosensor integrated with bio-photoics for early stage detection, diagnosis, and monitoring of human breast cancer
- Park, Seunghoon - RF MEMS switch
Mid-term exam #1 solution
Mid-term exam #2 solution
Course Materials
Papers
(These are not reading assignments but provided as the background material.)
- Ref. 1: K. Petersen, et al., "Silicon as a Mechanical Material" Proc. IEEE, Vol. 70, 1982
- Ref. 2: G. Kovacs, et al., "Bulk Micromachining of Silicon" Proc. IEEE, Vol. 86, 1998
- Ref. 3: J. Bustillo, et al., "Surface Micromachining for Microelectromechanical Systems" Proc. IEEE, Vol. 86, 1998
- Ref. 4: J. C. Arnold, et al., "Charging of pattern features during plasma etching" J. Applied Physics, vol. 70, 1991
- Ref. 5: A. A. Ayon, et al., "Fabrication and testing of suspended structures compatible with silicon-on-insulator technology" J. Vac. Sci. Technol, Vol. 17, 1999
- Ref. 6: W. Tang, et al., "Laterally Driven Polysilicon Resonant Microstructures" IEEE MEMS, 1989
- Ref. 7: W. Tang, et al., "Electrostatically Balanced Comb Drive for Controlled Levitation" Solid-State Sensors and Actuators Workshop (Hilton Head), 1990
- Ref. 8: U. Krishnamoorthy, et al., "Dual Mode Micromirrors for Optical Phased Array Application" Transducers 2001
- Ref. 9: U. Krishnamoorthy, et al., "Self-Aligned Vertical Electrostatic Combdrives for Micromirror Actuation" IEEE J. MEMS, Vol. 12, 2003
- Ref. 10: O. Tsuboi, et al., "A Rotational Comb-Ddriven Micromirror with a Large Deflection Angle and Low Drive Voltage" IEEE MEMS, 2002
- Ref. 11: D. Hah, et al., "A Self-Aligned Vertical Comb-Drive Actuator on an SOI Wafer for a 2D Scanning Micromirror" J. Micromech. Microeng., Vol. 14, 2004
- Ref. 12: J. G. Smits, et al., "The Constituent Equations of Piezoelectric Heterogeneous Bimorphs" IEEE Trans. Ultrasonics, Ferroelectrics, Frequency Control, Vol. 38, 1991
- Ref. 13: Q. Huang, et al., "Analysis and Design of Polysilicon Thermal Flexure Actuator" J. Micromech. Microeng. Vol. 9, 1999
- Ref. 14: J. Comtois, et al., "Applications for Surface-Micromachined Polysilicon Thermal Actuators and Arrays" Sensors and Actuators:A, Vol. 58, 1997
- Ref. 15: L. Que, et al., "Bent-Beam Electro-Thermal Actuators For High Force Applications" IEEE MEMS, 1999
- Ref. 16: H. Schenk, et al., "Large Deflection Micromechanical Scanning Mirrors for Linear Scans and Pattern Generation" IEEE J. Special Topics on Quantum Electronics, 2000
- Ref. 17: R. Conant, et al., "A Flat High-Frequency Scanning Micromirror" Solid-State Sensors and Actuators Workshop (Hilton Head), 2000
- Ref. 18: D. Hah, et al., "Low-Voltage, Large-Scan Angle MEMS Analog Micromirror Arrays With Hidden Vertical Comb-Drive Actuators" IEEE J. MEMS, Vol. 13, 2004
- Ref. 19: D. Hah, et al., "A Self-Aligned Vertical Comb-Drive Actuator on an SOI Wafer for a 2D Scanning Micromirror" J. Micromech. Microeng., Vol. 14, 2004
- Ref. 20: V. Milanovic, et al., "Monolithic High Aspect Ratio Two-Axis Optical Scanners In SOI", IEEE MEMS, 2003
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